MEMS+ creates accurate, parameterized MEMS models for simulation in MATLAB and Simulink. MEMS+ is used for constructing models of state-of-the-art MEMS sensors and actuators that depend on electrostatic or piezoelectric effects. It is highly relevant for motion sensors (accelerometers and gyroscopes) as well as microphones and pressure sensors. Simulations with automatically generated models of MEMS sensors can be used for MEMS design tasks as well as system integration tasks. Supported MEMS design tasks include determining mechanical mode shapes and frequencies, frequency response, linearity, input range, and sensitivity to MEMS manufacturing effects such as sidewall angles and mask offset. Supported system integration tasks include sensing/control algorithm development, noise analysis, and predicting DC offset, drift, output range, frequency response, and temperature sensitivity. For MEMS actuators such as micromirrors and switches (for electrical, RF, and optical signals), MEMS+ models can be used to predict pull-in/lift-off voltage, switching time, contact force, and sensitivity to manufacturing effects such as residual stress.
Building a MEMS device model in MEMS+ does not require programming skills or finite element analysis—simply select and snap together pretested, full parameterized components in an intuitive 3D graphical interface. Each component has a 3D view and an underlying behavioral model that’s accessible to MATLAB and Simulink. The behavioral models are highly accurate, special-purpose finite elements that capture nonlinear electrostatic effects, electrostatic fringing fields, and piezoelectric effects as well as structural mechanics and dynamics. After a design is assembled in MEMS+ Innovator, integration with Simulink makes it easy to import a MEMS+ block into a signal flow diagram. MEMS+ models can also be accessed via the MATLAB scripting interface. MEMS+ expands the transient analysis capabilities of Simulink to include DC, DC sweep, modal, and AC analyses. MATLAB and Simulink simulation results can be loaded back into the MEMS+ Scene3D module for viewing 3D animations.
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